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The Atomic Force Microscope at the SATHI facility is a high vacuum AFM ideal for precise semiconductor failure analysis and sensitive materials research. Operating in a high vacuum environment, it delivers enhanced accuracy and repeatability, minimizing tip and sample damage. It's the key to a range of applications, including dopant concentration assessment using Scanning Spreading Resistance Microscopy (SSRM).
Model: Park NX-Hivac
Manufacturer: Park Systems.
AFM modes
Contact Mode
True Non-Contact Mode
Tapping Mode
Lateral Force Microscopy
Electrical Force Microscopy (EFM)
Dynamic Contact EFM
Scanning Kelvin Probe Microscopy (KPFM)
Piezoelectric Force Microscopy (PFM)
Scanning Tunneling Microscopy (STM)
Magnetic Force Microscopy (MFM)
Conductive Mode (CAFM with VECA and ULCA)
Scanning Capacitance Microscopy (SCM)
F-D Spectroscopy
Scanning Spreading Resistance Microscopy (SSRM)
Location:
Room 102, SATHI-CISCoM, RCC (First Floor),
IIT Hyderabad
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